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MEMS
Example of
device manufacturing
B2it
Test Chart & Color Viewer
IC Tag
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Dai Nippon Printing Co.,Ltd.
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MEMS
Example of device manufacturing
  Tri axial piezoresistive accelerometer manufactured by using with 8 inch SOI wafer.

Tri axial Piezoresistive Accelerometer
manufactured by using with 8 inch wafer		   Overviwe of tri axial accelerometer. Chip size: 1.3mm*1.3mm*1.25mm(H)

Chip overview
1.3mm×1.3mm×1.25mm(H)
collaboration with
WACOH Corp.
 
 
Rated Acceleration ±5 G
Sensitive 0.3 〜 0.6 mV/V/G
Response frequency DC 〜 100 Hz
Gauge resistance 8 〜 30 kΩ
Lineality 2 %
Off-axial sensitivity 5 %
Supply oltage 1 〜 3 Vdc
Temperature range -20 〜 80 ℃
Specification of MEMS chip
Type：MS005
 

 
 
 

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