| |
| Chip size |
1.0×1.2×0.4 |
mm |
| Acceleration range |
±3 |
G |
| Sensitivity |
0.2 〜 0.3 |
mV/V/G |
| Sensor frequency response |
DC 〜 100 |
Hz |
| Gauge resistance |
10 〜 40 |
kΩ |
| Sensitivity nonlinearity |
<2 |
% |
| Cross-axis sensitivity |
<6 |
% |
| Operating voltage range |
1 〜 3.3 |
V |
| Operating temperature range |
−30 〜 85 |
℃ |
|
 |
Specification of MEMS chip |
Electronic Device Operations 
